ULPA Mini-Pleat Filter U15 U16 for Semiconductor Cleanrooms
For environments requiring the highest level of cleanliness, our U15 U16 ULPA filter offers unmatched performance. As a specialized mini-pleated HEPA/ULPA filter, it achieves an incredible 99.99995% efficiency @ 0.12um. Designed with an anodized aluminum alloy frame and premium glass fiber media, it is the trusted choice for the world’s most demanding microelectronics and nanotechnology facilities.
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Product Key Features
- Extreme Filtration Grade: Specifically designed for U15 and U16 requirements to intercept sub-micron particles.
- Advanced Hot-melt Separator: Eliminates the risk of aluminum foil shedding, perfect for sensitive electronic manufacturing.
- Excellent Uniformity: Ensures good uniformity winds across the entire filter face for laminar flow.
- Individually Tested: Each mini-pleat filter is strictly tested to guarantee zero leaks at the terminal end.
Material & Craftsmanship
External Frame: High-precision Aluminum alloy profile available in 50mm, 69mm, or 90mm thickness.
Media Type: Ultra-fine fiberglass filter paper for sub-micron capture.
Separator: Advanced Hot-melt beads that eliminate the risk of aluminum foil shedding.
Sealant: Professional gel-glue (Polyurethane) for a hermetic, leak-proof seal.
Protection: Available with double-sided face guards for media protection during installation.
Applications
Semiconductor Fabrication: Critical for Wafer Fabrication and lithography areas where even 0.1um dust is fatal to production yields.
Microelectronics Assembly: Protects LCD/OLED display production lines and high-density micro-chip assembly zones.
Aerospace Engineering: Specialized filtration for satellite assembly and high-precision optical instrument laboratories.
Photovoltaic (PV) Industry: Maintains dust-free conditions for solar cell manufacturing and advanced coating processes.
Nanotechnology Research: Ideal for Nanotech labs requiring Class 1 or Class 10 cleanroom environments to study molecular structures.
Biotechnology & Gene Therapy: Provides ultra-pure air for sensitive genomic sequencing and sterile biopharmaceutical research.
Nuclear Power Facilities: Used in high-security exhaust systems to capture radioactive sub-micron aerosols.
Competitive Comparison
| Feature | Chuqi MaxFlow-Ultra (ULPA) | Standard Mini-Pleat (HEPA) | The Chuqi Advantage |
| Filtration Efficiency | 99.99995% @ 0.12um. | 99.99% @ 0.3um. | Extreme Yield Protection: Captures 10x smaller particles. |
| Wind Uniformity | Superior Laminar Flow control. | Basic airflow distribution. | Zero Turbulence: Critical for precision lithography. |
| Contamination Risk | Zero Metal Shedding (Hot-melt). | Potential foil shedding (Separator type). | Silicon Safety: Prevents metallic contamination in wafers. |
| Testing Standards | 100% Individual Leak Scan. | Batch sampling or basic testing. | Certified Reliability: Guaranteed performance at the terminal end. |
Specifications
| External dimensions (mm) | Rated air volume (m³ / h) | initial resistance (Pa) | efficiency (%) | Filter media |
| 610 × 610 × 69 | 600-1000 | ≤ 220 | 95-99.99995 | Fiberglass
|
| 760X610X69 | 800-1200 | ≤220 | 95-99.99995 | |
| 915×610×69 | 1000/1500 | ≤220 | 95-99.99995 | |
| 1170×570×69 | 1100/1800 | ≤220 | 95-99.99995 | |
| 1220×610×69 | 1200/2000 | ≤220 | 95-99.99995 |
Chuqi MaxFlow-Ultra Series represents the pinnacle of our technical expertise in high-precision manufacturing. We specialize in producing mini-pleated HEPA/ULPA filters that meet the rigorous demands of the semiconductor industry. By using anodized aluminum alloy frames and advanced gel-glue sealant, we ensure that every filter provides a permanent, hermetic seal. Our commitment to quality is backed by our 100% individual testing protocol, ensuring that no sub-micron leak ever compromises your wafer fabrication environment.
Frequently Asked Questions
Q1: What is the primary difference between HEPA and ULPA mini-pleat filters?
While HEPA filters target 0.3um particles, our ULPA mini-pleat filter is engineered for extreme filtration grades (U15/U16), achieving 99.99995% efficiency @ 0.12um to protect the most sensitive microelectronics.
Q2: Why is “Hot-melt” technology critical for semiconductor cleanrooms?
Traditional aluminum separators can shed microscopic metal fragments. Our advanced hot-melt separator eliminates this risk, ensuring zero metal shedding which is vital for LCD/OLED display and wafer production.
Q3: How do you ensure the filter does not leak during terminal air supply?
Each unit is individually tested using precision scanning to guarantee zero leaks. Additionally, we use professional gel-glue (Polyurethane) to create a hermetic seal with the frame.
Q4: Can these filters be used in high-precision optical labs?
Yes, they are highly recommended for optical instrument labs and aerospace engineering where maintaining good uniformity winds and sub-micron air purity is essential for instrument accuracy.
Q5: What are the size options for the external frame?
We offer high-precision aluminum alloy profiles in standard thicknesses of 50mm, 69mm, and 90mm to fit various FFU and ceiling grid configurations
